Nested potassium hydroxide etching and protective coatings for silicon-based microreactors
نویسندگان
چکیده
منابع مشابه
Nested potassium hydroxide etching and protective coatings for silicon-based microreactors
We have developed a multilayer, multichannel microfabricated reactor that uses elemental fluorine as a reagent and generates hydrogen fluoride as a byproduct. Nested potassium hydroxide etching (using silicon nitride and silicon oxide as masking materials) was developed to create a large number of channels (60 reaction channels connected to individual gas and liquid distributors) of significant...
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Procedure 1. Place the specimen on a clean glass slide. Add 1 drop of 20% KOH. 2. Place the cover glass on top of the slide and gently press to get rid of any air bubbles. Blot excess solution from the finished slide preparation with the gauze. 3. Place slide on the microscope stage and start with a low-power (10 ×) examination. To make epithelial cells visible, reduce illumination by lowering ...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2014
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/24/3/035011